Semiconductors

In semiconductor processing, graphite belongs in the process tool, not in the ingot or the wafer. The real uses are susceptors and wafer carriers in epitaxy and CVD, and hot-zone parts in silicon crystal growth (Czochralski) and SiC growth (PVT): heaters, crucibles or supports, shields and shaped parts.

A hot-pressing die, a hardening-furnace liner or a PVD mould-release coating does not serve this process. The criteria are purity, outgassing and stable geometry in vacuum or inert atmosphere.

ESGRAF machines components to drawing from high-purity isostatic graphite and advises on grade selection by process, temperature and allowable contamination.

Applications with ESGRAF

• Susceptors, platens and boats for epitaxy and CVD: they hold and heat the wafer.
• Heaters, crucibles, shields and supports for CZ pullers and SiC growth furnaces.
• Geometry copy from a drawing or a used part when the original spare is no longer available.
• Chamber insulation with carbon felt or CFC panels when the hot zone requires it — not as heat-treatment liners.

Selection balances purity, grain size, resistivity (if the part heats) and dimensional stability. An industrial furnace grade does not replace a high-purity grade without review.

Recommended product families

• Isostatic / high-density graphite — usual family for susceptors and precision parts.
• Extruded graphite — profiles and constant-section heaters.
• Graphite machining — finished parts to drawing.
• Soft felt and CFC panels — hot-zone insulation when the tool requires it.

If you already run a reference grade, ESGRAF can compare datasheets and propose an available equivalent. Applications engineering validates the match; a trade name alone does not declare equivalence.

Frequently asked questions

Which graphite parts does a semiconductor process use?

Susceptors and wafer carriers in epitaxy and CVD, and heaters, crucibles, shields and supports in crystal growth. Not pressing dies, not hardening liners and not mould-release paints.

Will heat-treatment furnace graphite work?

Only if the grade meets the purity and geometry of the process tool. A hardening liner or a load fixture is not a susceptor and not a puller heater.

Do you machine parts to drawing or only sell block?

Both. Quote block or blank for in-house machining, or a finished part from drawing. Share tolerances, quantity and purity requirement.

Do you make SiC-coated susceptors?

SiC coating is a process specification, not a standard catalog finish. The graphite part is quoted; if coating is part of the specification, state it when requesting.

How do I order these parts in Mexico?

Use quote with drawing, process and atmosphere, or contact for grade review.

Request semiconductor graphite

For susceptors, boats or crystal-growth components, request a quote or write to contact with drawing and process conditions.